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Automated Wafer Handler

Features

Cleanroom Class 1000 (ISO 6)
Automated wafer handling effector arm
Wafer cassette slot mapping
Wafer aligner
User friendly HMI touch screen
HEPA filter (Optional)
Touch screen monitor (Optional)
External stand-alone wafer load port to support AIV/AGV loading or unloading (Optional)
SECS/GEM communication (Optional)
SEMI S2/S8 compatibility (Optional)

Description

This unit is used for wafer sorting, wafer mapping, wafer loading & unloading, and wafer aligning.

Specifications

Model No.	Size	Machine Dimension (mm) L x W x H	Fixed Point to Front Dimension (X)	Weight (Approximately)
NTM8050W		1766 x 1256 x 1672 mm		600 kg

Model No.	NTM8050W
Size
Machine Dimension (mm) L x W x H	1766 x 1256 x 1672 mm
Fixed Point to Front Dimension (X)
Weight (Approximately)	600 kg

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